国家/地区 韩国（2）
IPC部 C（2）
IPC大类 C23（2）
IPC小类 C23C（2）
IPC C23C016/40（2）
发明人
公开年 2022（2）
申请年
专利权人

Optical device comprises a substrate having multiple waveguides spaced apart from each other with a predetermined gap into a chamber, and depositing a metal oxide on each of the waveguide through an atomic layer deposition method.

HAN S, JAE P Y

Depositing thin film, comprises depositing graphene oxide film on first surface of substrate, and depositing first haze film on graphene oxide layer.

YOON S Y, YOOK J, JAI L H, SHIM W P