国家/地区 世界知识产权组织（3）
IPC部 C（3）
IPC大类 H05（3） C08（2）
IPC小类 H05B（3）
IPC
发明人
公开年 2023（3）
申请年 2022（3）
专利权人

Ceramic heater used in semiconductor manufacturing equipment, comprises ceramic substrate comprising aluminum nitride, magnesium oxide/alumina/spinel, calcium oxide and titanium dioxide, and resistance heating element.

KIM Y H, KIM J H, PARK H Y, KIM B S, HWAN K J, SUNG K

Composition used for forming film heater, comprises binder resin containing resol phenolic resin, conductive particles comprising carbon nanotubes, adhesion enhancer comprising polyvinyl acetal, and heat resistance enhancer comprising silsesquioxane powder.

KIM Y J, YOU G J, JANG S H, KIM H J, PARK G H, HONG B K, YOONJIN K, YU G, HYUN C, PARK K H

Aerosol provision device used in aerosol provision system has receptacle to receive aerosol generating material, inductor coil to generate varying magnetic field for heating susceptor and electromagnetic shield member covering inductor coil.

BURGESS J N, MCGRATH C