国家/地区 韩国（2） 美国（2）
IPC部 B（2）
IPC大类 B01（2）
IPC小类 B01J（2）
IPC B82Y040/00（2）
发明人
公开年
申请年 2012（2）
专利权人

Making graphene film comprises providing copper foil, placing foil in microwave plasma chemical vapor deposition chamber, evacuating chamber, providing hydrogen gas to chamber, exposing foil to plasma, and providing methane gas to chamber.

FISHER T S, KUMAR A

Graphene synthesis chamber for synthesizing graphene comprises chamber case in which substrate comprising metal thin film, gas supply unit, main heating unit which emits light to inner space to heat substrate; and auxiliary heating unit.

WON D, NAM W, WON D K, NAM W S