国家/地区 美国（4） 韩国（3） 中国（2）
IPC部 C（4）
IPC大类 C01（4）
IPC小类 C01B（4）
IPC B82Y040/00（2） C01B031/02（2） C01B032/194（2）
C23C018/16（2） C23C018/31（2） C23C028/00（2）
发明人 LEE H（4）
公开年
申请年 2011（2） 
专利权人 UNIV SUNGKYU.（2）

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Manufacture of metal-containing graphene hybrid composite for forming electrode, involves mixing acid solution, metal salt containing metal ions and oxidized graphene, reducing resultant mixture and supporting reduced product.

LEE H, YOON Y

Fabricating a three dimensional graphene structure e.g. carbon nanotube, comprises growing graphene on metal catalyst template in certain form, and removing template by dissolving template on which graphene has grown, in etching solvent.

YOO J, PATOLE S P, LEE H, YOO J B, SHASHIKANT P P

Resin plating comprises forming a graphene thin layer on a resin substrate and electroplating the resin substrate having the graphene thin layer formed on it.

BAE A H, SON S I, NAM J D, LEE J H, HWANG T S, OH J S, LEE H, EAH H B, SANG I S, JAE D N, JOON S O, JUN H L, TAE S H, HWANG T, LEE J, NAN J, PAE A, SUN S, OU J