国家/地区
IPC部 C（2）
IPC大类 C01（2）
IPC小类 C01B（2）
IPC C01B032/182（2）
发明人
公开年 2022（2）
申请年 2020（2）
专利权人

Optical element for use with electromagnetic radiation at specific wavelength in ultraviolet, extreme ultraviolet or soft X-ray bands, comprises reflective, transmissive, protective, interdispersed or capping layer coating with materials.

JAISWAL S

Producing pellicle structure useful for protecting photomask in semiconductor integrated circuits, comprises e.g. forming lower protective layer on entire surface of substrate, and forming amorphous thin film on lower protective layer.

KIM K B