国家/地区 台湾（2）
IPC部 B（2）
IPC大类 B01（2）
IPC小类 B01D（2）
IPC B01D067/00（2）
发明人
公开年
申请年
专利权人

Preparing graphene-containing mixed film, comprises e.g. using strong oxidant to oxidize layered graphite powder to form layered graphene oxide with carbonyl, carboxyl and epoxy groups, and mixing Dimethylformamide and graphene oxide.

LIN C, LIU T, CHUANG Y, WEI H, HSU N

Method for manufacturing pellicle for lithographic apparatus involves removing first substrate portion to form freestanding membrane from graphene layer, in which freestanding membrane is supported by second substrate portion.

PETER M, ABEGG E A, GIESBERS A J, KLOOTWIJK J H, NASALEVICH M A, VAN DEN EINDEN W T, VAN DER ZANDE W J, VAN ZWOL P, VERMEULEN J P M, VLES D F, VOORTHUIJZEN W, GIESBERS A J M, VAN ZWOL P J, VOORTHUIJZEN W P, VAN DEN EINDEN W T A J, VERMEULEN J P M B