国家/地区 韩国（2）
IPC部 B（2） C（2） H（2）
IPC大类 B01（2） C01（2） H01（2）
IPC小类 B01J（2）
IPC B01J019/08（2）
发明人
公开年
申请年
专利权人 HANWHA TECHWIN CO LTD（2）

Preparing graphene-based thin-film laminate used in e.g. transistor, comprises conducting cycle having e.g. contacting surface of graphene onto substrate with non-metal precursor gas and activating surface of graphene with plasma N times.

PARK C, CHO S, SEO S, SHIN S, KIM T, KIM S, PIAO Z, SEO S A, SHEN Z, PARK C H, CHO S M, SHIN S M, KIM T K, KIM S Y

Graphene synthesis chamber for synthesizing graphene comprises chamber case in which substrate comprising metal thin film, gas supply unit, main heating unit which emits light to inner space to heat substrate; and auxiliary heating unit.

WON D, NAM W, WON D K, NAM W S