国家/地区 美国（3）
IPC部 B（3） C（3）
IPC大类 B01（3）
IPC小类 B01J（3）
IPC C23C014/02（3）
发明人
公开年
申请年
专利权人

Preparing magnetron graphene-based micro-nano motor comprises mixing ferric chloride crystal powder with deionizgraphene-baseded water, immersing in ferric chloride solution, attaching carbon-based microspheres, and pumping out gas in vacuum cavity and continuously introducing oxygen.

CHEN X, HOU M, YAN L, XIE B, GUO Y, CHEN Y

Production of graphene used as wiring material, involves supplying carbon-containing gas and metal catalyst into chamber and reactivating catalyst by supplying process gas and carbon-containing gas to regrow graphene on catalyst surface.

IFUKU R, MATSUMOTO T

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A