国家/地区 日本（2）
IPC部 B（2）
IPC大类 B01（2） C01（2） C23（2）
IPC小类 B01J（2）
IPC C01B032/186（2）
发明人
公开年
申请年
专利权人

Production of graphene used as wiring material, involves supplying carbon-containing gas and metal catalyst into chamber and reactivating catalyst by supplying process gas and carbon-containing gas to regrow graphene on catalyst surface.

IFUKU R, MATSUMOTO T

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A