国家/地区 美国（4）
IPC部 B（4） C（4） H（3）
G（2）
IPC大类 B01（4） C01（4） G03（2）
H01（2）
IPC小类 B01J（4）
IPC B01J019/08（4）
发明人
公开年 2022（3）
申请年 2022（4）
专利权人

Production of solid carbon used in composition of matter, involves receiving carbon dioxide and water in reactor, dissociating carbon dioxide and water to form dissociated species, exposing dissociated species to electric field to facilitate reactions, generating and outputting solid carbon.

STOWELL M W, SIENKO L, STOWELL W M

Processing precursor material into product utilizing non-thermal plasma involves selectively converting plasma forming material to non-thermal plasma by microwave radiation, forming one or more streamers, and exposing hydrocarbon precursor material to streamers and microwave radiation.

ZELLER K W, SKOPTSOV G L, MUSSELMAN E T, STROHM J J

Performing low-temperature direct growth method of multilayer graphene for manufacturing pellicle for extreme ultraviolet lithography, involves forming etch stopper on substrate, and forming seed layer on etch stopper, where seed layer is selected from boron nitride, or boron carbon nitride.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K

Nanocrystalline graphene used for complementary metal-oxide-semiconductor process, comprises grains in stack of graphene sheets.

KIM S, BYUN K, CHO Y, SHIN K, LEE E, LEE C, SONG H, SHIN H, YOON J, LEE S, LIM H, BYUN K E, CHO Y C, SHIN K W, LEE C S, SONG H J, SHIN H J, SU Y J, LEE S Y, LIM H S, LI Z, YOUN J, SHEN X, LI C, LI Y, ZHAO L, JIN S