国家/地区 世界知识产权组织（2）
IPC部 C（2）
IPC大类 C01（2）
IPC小类 C01B（2）
IPC C01B032/186（2）
发明人 RYOTA I（2） TAKASHI M（2）
公开年
申请年 2020（2）
专利权人 TOKYO ELECTRON LTD（2）

Film forming by cleaning interior of treatment container, extracting and removing oxygen inside treatment container, introducing substrate into treatment container, and forming carbon film on substrate by plasma chemical vapor deposition.

MAKOTO W, TAKASHI M, NOBUTAKE K, RYOTA I, MASAHITO S, HIROKAZU U, MATSUMOTO T, KABURAGI N, IFUKU R, SUGIURA M, UEDA H, WADA M, KABUKI N

Detecting abnormal growth of graphene by measuring reflection spectrum of measuring object having graphene film, creating film structure model to calculate polarization parameter, incorporating calculated value and detecting abnormal growth.

RYOTA I, TAKASHI M, AKIRA F, SHIN K