国家/地区 德国（2）
IPC部 C（2） H（2）
IPC大类 C01（2） C23（2） H01（2）
IPC小类 C01B（2）
IPC H01J037/32（2）
发明人
公开年
申请年 2021（2）
专利权人

Device for producing graphene layer, has one electrode which is connected to positive pole of voltage source, and other electrode that is connected to negative pole and is provided for carbon ions accumulate in graphene attachment region so as to form graphene layer.

KREISCHER U

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A