国家/地区 美国（6）
IPC部 C（6）
IPC大类 C01（6） H01（3） B82（2）
C23（2）
IPC小类 C01B（6）
IPC C01B031/04（4） B82Y040/00（2） C01B032/194（2）
C23C016/26（2）
发明人 ZHANG Z（6）
公开年 2013（2） 2014（2）
申请年 2012（2）  2013（2） 
专利权人 IND TECHNOLO.（2）

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Preparing nano carrier material involves mixing nano cellulose solution and graphene, crushing, subjecting to ultrasonic, mixing uniformly to obtain nano cellulose/graphene suspension, mixing with phenolic resin, and stirring.

WU Y, ZHANG Z, QING Y, WU Q, LUO S, TIAN C, LI L

Making metal oxide-graphene composite involves providing composition comprising graphene oxide and at least one metal-containing substrate, where composition is dispersed in liquid medium, and forming metal oxide-graphene composite.

ZHAO C, DONG X, MIN S, ZHANG Z, WANG K, DONG J, QIAN X, CHEN X

Apparatus for manufacturing graphene sheets comprises gas tube, hydrocarbon gas source, microwave generator for generating microwave passing the tube through waveguide tube to form microwave plasma torch from gas and tube collector.

HUANG K, CHANG C, KOU C, HSIEH Y, XIE Y, ZHANG Z, HUANG K P, CHANG C C, KOU C S, HSIEH Y T

Method for forming e.g. multi-layered graphene layer deposited on glass substrate, involves utilizing microwave with electron cyclotron resonance mechanism to excite carbon-containing gas to deposit graphene layer on substrate.

HUANG K, CHANG C, HSIEH Y, CHIU P, MEDINA H, QIU B, XIE Y, ZHANG Z, MEDIONA H, HUANG K P, CHANG C C, HSIEH Y T, CHIU P W

Manufacture of large-scale three dimensional transparent graphene electrode used in electric and electronic applications, involves spraying conductive macromolecule solution and graphene solution, and drying.

HUH H, KIM W S, KIM H J, YOO E S, CHOI S H, HWANG J Y, JANG J Y, KIM T I, HEO H, HYEONG P N, SIK K U, JIN K H, SEONG Y E, HUN C S, YEONG H J, YEONG J J, IL K T, PARK N H, JIN T, ZHANG Z, CHOE S, HWANG J, KIM H, KIM W, YOO E