国家/地区 日本（2）
IPC部 B（2）
IPC大类 B01（2） C01（2） C23（2）
H01（2）
IPC小类 B01J（2）
IPC B01J019/08（2）
发明人
公开年 2013（2）
申请年
专利权人

Preparing graphene used in e.g. memory device, comprises forming organic thin film on substrate, irradiating upper portion of organic thin film with radiation to cross-link organic thin film, and then carbonizing.

CHOI J H, JUNG C H, HWANG I T, KANG D W

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A