国家/地区 日本（2）
IPC部 C（2） H（2）
IPC大类 C01（2） H05（2）
IPC小类 C01B（2）
IPC C01B032/182（2）
发明人
公开年
申请年
专利权人 TOKYO ELECTRON LTD（2）

Upper electrode assembly used in plasma processing apparatus, has heat transfer sheet that is mounted between electrode plate and metal plate and having vertically oriented portion with vertically oriented graphene structures.

TSUJIMOTO H, KOBUNE T, LI L, LEE L, KOBUNEDAKAKI

Manufacture of graphene structure used for wiring, involves preparing substrate to be processed, and forming graphene structure on substrate surface by plasma chemical vapor deposition using plasma of process gas containing oxidizing gas.

RYOTA I, TAKASHI M, IFUKU R, MATSUMOTO T