国家/地区 台湾（3）
IPC部 C（3）
IPC大类 C01（3） H01（2）
IPC小类 C01B（3）
IPC C01B032/194（3）
发明人 CHEN C（3）
公开年
申请年
专利权人

Manufacturing method of three-dimensional wrinkled graphene, involves spraying graphene solution from top into reaction element, and making gas temperature in reaction element not greater than freezing point of solvent of graphene solution.

CHEN C, LIU Y P

Repairing defects of graphene comprises subjecting composite fluid having reactive compound and supercritical fluid to impregnate graphene powder with in reactor containing graphene powder and separating fluid and powder, and adsorbing.

LI Z, TU P, CHEN C, HUANG Y, LI Z Y, TU P M, CHEN C J, HUANG Y W

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C