国家/地区 中国（2）
IPC部 C（2）
IPC大类 C01（2） C23（2）
IPC小类 C01B（2）
IPC C01B032/186（2）
发明人
公开年 2020（2）
申请年
专利权人

Graphene roll-to-roll continuous growth device comprises feeding chamber provided with two driven rollers, collecting chamber connected to two active rollers and growth chamber provided with isolation support plate and heating device.

WU H, ZHANG Q, YUAN K, SHEN L

Method of forming graphene on substrate, involves treating surface of substrate placed in reaction chamber with plasma, and growing graphene on surface of substrate by plasma enhanced chemical vapor deposition (PECVD).

SHIN K, KIM C, YAMAMOTO K, LEE C, SONG H, LEE E, BYUN K, SHIN H, AN S, SHEN J, JIN C, SHAN B, LI C, SONG X, LI Y, BIAN Q, SHEN X, AN X, SHIN K W, LEE C S, SONG H J, BYUN K E, SHIN H J, AHN S J