国家/地区 韩国（2）
IPC部 C（2）
IPC大类 C01（2）
IPC小类 C01B（2）
IPC C01B031/02（2）
发明人
公开年 2014（2）
申请年
专利权人

Production of graphene for wiring film of three-dimensional stacked memory, involves decomposing carbon-containing gas with low reactivity in space which opposes substrate, and decomposing carbon-containing gas with high reactivity.

KAGAYA M, MATSUMOTO T, NISHIDE D

Manufacturing graphene coated steel plate, comprises generating plasma gas, passing gas through water or organic compound to generate functional group, binding functional group on surface of material, and coating graphene on surface.

YOO H J, KIM J K, LEE S K, JUNG Y G, KIM J S