国家/地区
IPC部 C（2）
IPC大类 C01（2） C23（2）
IPC小类 C01B（2）
IPC C01B031/04（2）
发明人
公开年
申请年 2016（2）
专利权人

Method of growing graphene for use in e.g. biomedical applications, involves introducing reaction gas containing oxygen-containing carbon source into furnace, heating, UV-irradiating reaction gas and depositing graphene film on substrate.

CHIU J, YEH C, CHIU P, QIU B, QIU R, YE Z

Manufacturing method of non-catalytic substrate growth graphene, involves performing pre-heating process for preheating a substrate before additionally performing plasma-enhanced chemical vapor deposition.

LEE Y T