国家/地区 中国（3）
IPC部 C（3）
IPC大类 C01（3）
IPC小类 C01B（3）
IPC C01B032/184（3）
发明人 LIN Z（3）
公开年 2018（3）
申请年 2016（3）
专利权人

Preparing diamond-graphene heterostructure composite material involves placing diamond plated with metal dielectric film into tubular furnace under hydrogen gas inlet, rising temperature rapidly, annealing and cooling to room temperature.

DAI D, LIN Z, JIANG N, LIU Y

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Preparing graphene comprises e.g. passivating energetic material and passivating agent, drying, drying passivation product in reactor, igniting, washing reaction product, centrifuging and freeze-drying.

LIN Z, QUANWEI L, RENMING P, WENCHENG F, XIANGYANG L, XURAN X, ZHENG W