国家/地区 中国（2）
IPC部 C（2）
IPC大类 C23（2） C30（2）
IPC小类 C23C（2）
IPC C23C016/26（2）
发明人
公开年 2020（2）
申请年
专利权人

Composite seed crystal useful for aluminum nitride single crystal growth comprises aluminum nitride ceramic substrate, graphene thin layer on aluminum nitride ceramic substrate and aluminum nitride thin film on graphene thin layer.

GUO L, HU W, WANG W, CHEN X

Pretreating graphene growth substrate comprises using copper foil or copper-nickel alloy foil as the base, polishing base, placing in tube furnace for annealing, taking annealed substrate of tube furnace, and polishing.

HAO Y, NIU W