国家/地区 中国（2）
IPC部 B（2）
IPC大类 G01（2）
IPC小类 G01J（2）
IPC G01J005/20（2）
发明人
公开年 2021（2）
申请年 2021（2）
专利权人

Temperature measuring device for graphene drilling processing, has angle rotating mechanism that drives thermal radiation receiving instrument to rotate along X, Z axis direction of processing main shaft.

LIU X

Method of preparing multilayer structure infrared micro-bridge detector, involves depositing third metal interconnection layer and second dielectric layer, and etching third metal interconnection layer into second patterned electrode structure to form absorber plate.

PAN H, WU P, DI G