国家/地区 韩国（3） 中国（2） 日本（2） 美国（2） 世界知识产权组织（2）
IPC部 B（3）
IPC大类 B01（3）
IPC小类 B01D（3）
IPC C01B031/04（3）
发明人
公开年 2017（3）
申请年 2015（2） 
专利权人

Method for manufacturing pellicle for lithographic apparatus involves removing first substrate portion to form freestanding membrane from graphene layer, in which freestanding membrane is supported by second substrate portion.

PETER M, ABEGG E A, GIESBERS A J, KLOOTWIJK J H, NASALEVICH M A, VAN DEN EINDEN W T, VAN DER ZANDE W J, VAN ZWOL P, VERMEULEN J P M, VLES D F, VOORTHUIJZEN W, GIESBERS A J M, VAN ZWOL P J, VOORTHUIJZEN W P, VAN DEN EINDEN W T A J, VERMEULEN J P M B

Making integral 3-dimensional graphene-carbon hybrid foam used e.g. to make fumed heat sink and heat pipe, comprises e.g. mixing multiple particles of -graphitic material and -solid polymer carrier material in impacting chamber.

ZHAMU A, JANG B Z

Manufacturing carbonized fiber or graphene composite for use in water treatment, electrode carrier for energy storage, and supporter for all kinds of catalyst, involves stripping graphene oxide chemically.

SOO J P, MI H C