国家/地区 韩国（2） 美国（2）
IPC部 C（2）
IPC大类 C23（2）
IPC小类 C23C（2） H01L（2）
IPC C23C016/02（2）
发明人 LEE C（2）
公开年 2023（2）
申请年
专利权人 SAMSUNG ELEC.（2）

Layer structure for use in integrated circuit device, comprises lower layer, ion implantation layer in lower layer, and carbon-based material layer on ion implantation layer, and ion implantation layer includes carbon, and further has high electrical performance with ultra small structure.

YOO M, BYUN K, KIM S, LEE C, LEE C S, BYUN K E, YOO M S

Method of forming nano crystalline graphene, involves arranging substrate having pattern in reaction chamber, injecting reaction gas into reaction chamber, reaction gas including carbon source gas, inert gas, and hydrogen gas that are mixed, generating plasma of reaction gas in reaction chamber.

LEE C, JUNG A, SHIN H, SHIN K, SHIN K W, SHIN H J, JUNG A R, LEE C S