国家/地区 中国（2）
IPC部 B（2）
IPC大类 B08（2）
IPC小类 B08B（2）
IPC
发明人
公开年 2023（2）
申请年 2021（2）
专利权人

Cleaning graphite oxide without involving hydrochloric acid, comprises e.g. oxidizing graphite by chemical methods, diluting with water, collecting filter cake, washing filter cake with water, adding water and hydrogen peroxide for slurry, and performing solid-liquid separation.

CHENG H, PEI S, HUANG K, REN W

Apparatus for treating substrate, comprises substrate support assembly having spin head onto which substrate is seated, fluid supply unit for supplying fluid to substrate, bowl assembly having bowls overlaid to surround support assembly, and ascending and descending unit for moving bowl assembly.

LEE T Y, LI Z, LEE T