国家/地区 韩国（2）
IPC部 C（2）
IPC大类 C01（2）
IPC小类 C01B（2）
IPC
发明人
公开年 2023（2）
申请年 2022（2）
专利权人

Pellicle used for reticle for extreme-UV exposure, comprises pellicle film through which extreme-UV rays transmit and support frame for supporting pellicle film, where pellicle film comprises multilayer thin film structure.

KIM Y H, KIMYONGHWAN

System for detecting two-dimensional (2D) object, has identifying 2D detection target or detecting its location using each contrast ratio according to red, green and blue (RGB) wavelength band extracted from optical image of 2D detection target.

SEO Y H, NGUYEN D C, PARK Y E, YONGHO S, BALL C