国家/地区 中国（3）
IPC部 C（3）
IPC大类 C01（3）
IPC小类 C01B（3）
IPC
发明人 LI L（3）
公开年 2022（2）
申请年 2022（2） 
专利权人

Upper electrode assembly used in plasma processing apparatus, has heat transfer sheet that is mounted between electrode plate and metal plate and having vertically oriented portion with vertically oriented graphene structures.

TSUJIMOTO H, KOBUNE T, LI L, LEE L, KOBUNEDAKAKI

Diamond product with mixed dimension carbon covalent laminated structure surface layer comprises diamond matrix and mixed dimension carbon covalent laminated structure surface layer.

ZHAO G, YANG Y, WU Y, WANG R, LI L, HE N, YAN B, CHEN N

Preparing wafer-level single crystal copper foil comprises cutting edges of polycrystalline copper foil to obtain polycrystalline copper foil with notches, and annealing in hydrogen atmosphere to obtain single crystal copper foil.

LI Y, LI L, CHEN Z, SU C, TIAN B