国家/地区 台湾（2）
IPC部 B（2）
IPC大类 B01（2）
IPC小类 B01J（2）
IPC C01B031/04（2） C23C016/26（2）
发明人
公开年
申请年 2013（2）
专利权人

Graphene manufacturing system, useful for growing graphene layers on insulated surface of work piece, comprises furnace body having working chamber, catalyst source, hydrogen source, and carbon feedstock source.

TENG P, CHIU P, LU C, TENG P Y, CHIU P W, LU C C

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A