国家/地区 中国（2）
IPC部 C（2）
IPC大类 C01（2）
IPC小类 C01B（2）
IPC C01B032/194（2）
发明人 LI N（2） XIA Y（2） ZHAO L（2）
公开年
申请年 2019（2）
专利权人 INST MICROELECTRONICS CHINESE ACAD SCI（2）

Device for wet transferring graphene film, comprises e.g. target substrate stage which is set in water tank, and is parallel to bottom of water tank, and target substrate set on upper surface of target substrate stage.

LU W, XIA Y, LI N, ZHAO L, LENG X, HE M, JIE X

Processing graphene thin film material useful in field-effect transistor, optoelectronics and microprocessor field, comprises e.g. adjusting carrier sample stage to processing positioning point and performing selective scanning modification.

XIE J, QU F, XIA Y, LI N, ZHAO L, GUAN Y