国家/地区 | Scotland(3) |
关键词 | |
出版物 | |
出版时间 | |
机构 | UNIV EDINBURGH(3) |
作者 | CHEN T(3) |
MICROELECTRONIC ENGINEERING
GRADY E, MASTROPAOLO E, CHEN T, BUNTING A, CHEUNG R
JOURNAL OF VACUUM SCIENCE TECHNOLOGY B
CHEN T, MASTROPAOLO E, BUNTING A, STEVENSON T, CHEUNG R
ELECTRONICS LETTERS
CHEN T, MASTROPAOLO E, BUNTING A, CHEUNG R