国家/地区 日本（2） 世界知识产权组织（2）
IPC部 C（3）
IPC大类 C01（3）
IPC小类 C01B（3）
IPC C01B032/186（3）
发明人 IFUKU R（2） MATSUMOTO T（2） RYOTA I（2）
TAKASHI M（2）
公开年 2019（2）
申请年 2019（3）
专利权人 TOKYO ELECTR.（2）

Forming graphene structure by preparing to-be-processed substrate, pre-processing by supplying gas containing carbon containing gas to to-be-processed substrate, and forming a graphene structure on surface of to-be-processed substrate.

IFUKU R, MATSUMOTO T, SUGIURA M, RYOTA I, TAKASHI M, MASAHITO S

Preparing graphene glass assisted by metal nanoparticles for defogging glass, involves preparing metal nanoparticle dispersion on surface of glass substrate, and removing solvent to obtain pretreated substrate.

ZHAO Z, LI Y, ZHAO Y

Manufacture of graphene structure used for wiring, involves preparing substrate to be processed, and forming graphene structure on substrate surface by plasma chemical vapor deposition using plasma of process gas containing oxidizing gas.

RYOTA I, TAKASHI M, IFUKU R, MATSUMOTO T