国家/地区 德国（4） 美国（4） 中国（3）
IPC部 G（3） H（3）
IPC大类 G01（3） H01（2）
IPC小类 H01L（2）
IPC
发明人 RUHL G（3）
公开年 2015（4）
申请年 2014（3） 
专利权人 INFINEON TECHNOLOGIES AG（4）

Micro electromechanical system (MEMS) device e.g. MEMS microphone has membrane that is extended over cavity of support and is partially reinforced by graphene.

MASSONER J, MASONE J

Gas sensor for measuring concentration of carbon dioxide in gas environment, comprises graphene layer having side facing towards gas environment, electrode layer comprising electrodes, and chalcogenide layer.

RUHL G, HIRSCH T, ZOEPFL A

Electrical device e.g. photodetector, has multi-layer graphene structure for laterally contacting single-layer graphene part, and graphite part in contact with surface of multi-layer graphene structure.

RUHL G, FOERG R

Hall sensor structure, has carrier layer provided with side part, and seed layer whose part is removed between carrier layer and graphene layer to form graphene structure of graphene layer, where seed layer is formed on side part.

DEHE A, ECKINGER M, KOLB S, RUHL G, DEU A, RUHR G, IKEGINGER M