国家/地区 美国（3）
IPC部 H（3） C（2）
IPC大类 H01（3） C23（2）
IPC小类 C23C（2） H01L（2）
IPC C23C016/26（2） H01L021/02（2）
发明人 CHEN Z（3）
公开年
申请年
专利权人 PURDUE RES FOUND（3）

Electronic device comprises platinum-based electrode having protective layer thereon comprising graphene in amount effective to reduce platinum corrosion of electrode.

CHEN Z, PARK H, LEE H

Production of low-temperature growing graphene used for semiconductor application, involves placing substrate, providing carbon precursor, generating plasma, and removing carbon atom and cobalt layer which is annealed after deposition.

CHEN Z, ZHANG S

Graphene deposition process for deposition of graphene on substrates, involves generating radio frequency plasma at location proximate to substrate, while flowing precursor gas containing carbon through plasma and over substrate.

CHEN Z, CHUGH S, MEHTA R