国家/地区 美国（3）
IPC部 B（3） C（3）
IPC大类 B82（3） C23（3）
IPC小类 B82Y（3） C23C（3）
IPC B82Y040/00（3） C23C016/26（3） C23C016/46（3）
C23C016/48（3） C23C016/54（3）
发明人 WON D（3）
公开年 2019（2）
申请年 2019（3）
专利权人 HANWHA AEROS.（3） NPS CORP（3）

Graphene synthesis method comprises disposing substrate including metal thin film in inner space of graphene synthesis chamber, depressurizing inner space, supplying gas of carbon into inner space using gas supplier and irradiating light.

WON D, NAM W

Roll-to-roll graphene synthesis chamber has auxiliary heaters that are spaced apart from each other and arranged to define auxiliary space for synthesizing graphene on metal film which is placed in auxiliary space.

WON D, NAM W

Graphene synthesis chamber, has substrate placed in auxiliary space, first auxiliary heater arranged between first main heater and substrate, and second auxiliary heater arranged between second main heater and substrate.

WON D, NAM W