国家/地区 中国（4）
IPC部 C（4）
IPC大类 C23（4）
IPC小类 C23C（4）
IPC C23C016/26（2） C23C016/52（2） C23C016/56（2）
发明人 XU C（4）
公开年 2022（4）
申请年 2022（3） 
专利权人 INST METAL R.（2）

Composite base system for thin film deposition device, has first base comprising top surface and bottom surface opposite to each other, and radio frequency heating coil coaxially surrounded around second base.

LIU L, ZHENG D, XU C

One-step ultra-fast preparation method of graphene material loaded by metal nano-particle, involves using high-temperature substrate, quenching metal salt solution with liquid carbon source solution under protection of inert atmosphere, and quickly preparing graphene material.

CHENG H, XU C, ZHOU T, REN W

Transferring two-dimensional material by using higher fatty alcohol or higher fatty acid, comprises e.g. spin-coating to obtain higher fatty alcohol or fatty acid/two-dimensional material/substrate complex and obtaining higher aliphatic alcohol or fatty acid/two-dimensional material complex.

CHENG H, XU C, ZHOU T, REN W

Directly growing patterned graphite on integrated circuit chip, involves cutting ultra-thin copper foil, pressing, placing chip sample in thermal chemical vapor deposition system, dipping into copper corrosion liquid, etching lower copper through a poly(methyl methacrylate) layer and drying.

HU L, DENG J, QIAN F, XIE Y, XU C