国家/地区 台湾（4）
IPC部 C（3） H（3）
IPC大类 H01（3） C23（2）
IPC小类 H01L（3） C23C（2）
IPC
发明人 XU Y（4）
公开年 2021（2）
申请年 2020（2） 
专利权人 TAIWAN SEMIC.（2） UNIV TAIWAN .（2）

Plasma enhanced chemical vapor deposition method used in semiconductor structure, comprises turning on radio frequency source of radio frequency system to decompose aromatic hydrocarbon precursor into multiple active radicals at specific frequency to form graphene layer on magnetic layer.

WU Z, NI I, XU Y, HUANG J, WU C, HSU Y, HUANG J Z, HSU Y H

Application of amphoteric dispersant-PAC used as dispersant for graphene oxide in pore solution of cementitious materials.

HSU K C, LIU X Y, XU Y, HUANG C

Using deposition system involves loading wafer into processing chamber equipped with RF system, supplying aromatic hydrocarbon precursor into processing chamber, turning on RF power of RF system to decompose aromatic hydrocarbon precursor into active radicals.

WU C, NI I, HSU Y, HUANG J, XU Y, WU Z

Photosensing device for use in photosensing module, has photovoltage sensing mechanism which is coupled to corresponding graphene-semiconductor heterojunctions.

HSU K Y J, XU Y, HSU K Y