国家/地区 台湾（2） 美国（2）
IPC部 C（3）
IPC大类 C10（3）
IPC小类 C23C（3） C01B（2） C10L（2）
H01G（2） H01L（2）
IPC C23C016/26（3）
发明人
公开年 2022（2）
申请年 2022（2） 
专利权人

Acetylene fluid supply package for use in fabricating a semiconductor device, has pressure vessel, porous filler in the pressure vessel, improved solvent within the porous filler, where solvent solubilizing with acetylene absorbed within the improved solvent, improved solvent is triethyl phosphate.

HAN Y, CHUNG W, CHO Y, KANE W S, SONG X, SINHA A K, CHO Y J

Synthesizing few-layered graphene from biomass, by treating biomass with anhydrous ferric chloride to form homogenous mixture, pyrolyzing the mixture, exfoliating graphene from activated carbon and purifying formed exfoliated graphene.

DEY R S, BANERJEE M

Processing method for growing metal-doped graphene, involves performing plasma enhanced chemical vapor deposition process with carbon precursor, metal precursor, and predetermined element precursor to form metal-doped graphene.

HUANG K, CHI Y, JI Y