国家/地区 德国（3）
IPC部 C（3）
IPC大类 C23（3）
IPC小类 C23C（3） C01B（2）
IPC C23C016/26（3）
发明人 JOUVRAY A（3）
公开年
申请年 2014（2） 
专利权人 AIXTRON SE（3）

Device used to deposit graphene, carbon nanotubes and other coating, preferably carbon on strip-shaped element, comprises heat transfer-inhibiting unit placed between process zone and inlet opening and/or an outlet opening.

JOUVRAY A

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S

Apparatus for separating carbon-containing structures in form of nanotubes or graphene, has plate-shaped component that is arranged in process chamber housing and inserted in retaining recess formed in wall of process chamber housing.

RIPPINGTON D E, JOUVRAY A, RUPESINGHE N L, TEO K, TEO K B K, RUPESINGHE N