国家/地区 中国（4）
IPC部 C（4） H（2）
IPC大类 C23（4） C01（2） H01（2）
IPC小类 C23C（4） C01B（2） H01L（2）
IPC C23C016/26（4）
发明人
公开年 2021（4）
申请年 2020（2） 
专利权人

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Tribological system useful for e.g. rotor bearings in wind turbines, comprises base body and sandwich lubrication having binder-free solid lubricant layer including solid lubricant and lubricant layer with lubricant.

SCHWEIGKOFLER M, VENGUDUSAMY B, SEEMEYER S, LODERER D

Deposition of two-dimensional layer on substrate, involves feeding process gas through supply line into gas distribution chamber(s) of gas inlet containing gas outlet openings which open into process chamber, and heating substrate.

TEO K B K, MCALEESE C, CONRAN B R, MACALIZ C

Producing polymer-coated graphene layer structure involves e.g. adding substrate to reaction chamber, supplying flow comprising precursor compound to form graphene layer structure, heating and spin-coating using polymer or polymer precursor.

GLASS H, GUINEY I, TYLER M, WALLIS R, THOMAS S, TAYLOR M