国家/地区 美国（3）
IPC部 C（3）
IPC大类 C01（3） C23（3）
IPC小类 C01B（3）
IPC C01B031/04（3）
发明人
公开年
申请年 2014（3）
专利权人

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S

Graphene tape suitable for applying on a target surface, comprises support layer, first nanocomposite layer comprising a thin film layer and a graphene layer.

OEZYILMAZ B, MARTIN FERNANDEZ L, KULKARNI E S, CASTRO A H, OZYILMAZ B, FERNANDEZ M

Production of graphene for wiring film of three-dimensional stacked memory, involves decomposing carbon-containing gas with low reactivity in space which opposes substrate, and decomposing carbon-containing gas with high reactivity.

KAGAYA M, MATSUMOTO T, NISHIDE D