国家/地区 中国（4） 日本（3） 韩国（3） 美国（3） 世界知识产权组织（3） 欧洲专利局（EPO）（2）
IPC部 C（4）
IPC大类 C23（4）
IPC小类 C23C（4） C01B（3） B82Y（2）
IPC C23C016/26（4）
发明人
公开年 2013（4）
申请年 2013（2） 
专利权人

Film-forming apparatus for forming graphene film on film-forming target e.g. metallic foil, has roll-to-roll mechanism which provides tensile force relaxation unit that relaxes tensile force applied to transported film-forming target.

KOBAYASHI T, SHIMIZU K, KADONO K, MIZUGUCHI Y, MURAKAMI Y, MIZUKUCHI Y, SUMINO K

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A

Method for preparing graphene using thin-film chemical vapor deposition device, involves connecting quartz tube with charging system, air pressure regulator and vacuum system by flange, and surrounding quartz tube by heating furnace.

LIAN R, LIU C

Apparatus for growing carbon nanostructure i.e. graphene, on fiber for current carbon nanotube synthesis technique, has substrate inlet sized before growth zones to allow spoolable length substrate to pass through growth zones.

MALECKI H C, DAHNE J L, LOEBACH J P, GAIGLER R L, LEDFORD J T, MALECKI H, DAHNE J, LOEBACH J, GAIGLER R, LEDFORD J