国家/地区 中国（3）
IPC部 B（3）
IPC大类 H01（3） B01（2） C01（2）
IPC小类 H01J（3） B01J（2） C01B（2）
H01L（2）
IPC H01J037/32（3）
发明人
公开年
申请年
专利权人

Reactor system for producing carbon-containing powder, has microwave energy source, control circuit having output to generate control signal to adjust pulse frequency of microwave energy, voltage generator, and field-enhancing waveguide.

STOWELL M W, PHAM T V, ANZELMO B H, RISO T, RIESLE T, FAN D

Electrostatic chuck apparatus has substrate that is made of ceramic material comprising aluminum oxide and silicon carbide as main component and layered graphene in boundary of aluminum oxide and provided with electrode.

NOBUHIRO H, NAOTO K, HIDAKA N, KIMURA N

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A