国家/地区 美国（3）
IPC部 B（3）
IPC大类 C23（3）
IPC小类 C23C（3） B82Y（2） C01B（2）
IPC C23C016/26（3）
发明人 LI X（2）
公开年 2013（3）
申请年
专利权人 LI X（2）

Film-forming apparatus for forming graphene film on film-forming target e.g. metallic foil, has roll-to-roll mechanism which provides tensile force relaxation unit that relaxes tensile force applied to transported film-forming target.

KOBAYASHI T, SHIMIZU K, KADONO K, MIZUGUCHI Y, MURAKAMI Y, MIZUKUCHI Y, SUMINO K

Method for synthesizing e.g. graphene film using chemical vapor deposition-type furnace for electronics application, involves positioning two support fixtures in reaction chamber, and unloading substrate from support fixtures.

LI X, LIN Y, SUNG C

Apparatus for synthesizing graphene film on copper foil, has quasi enclosed substrate holder including open side, and cap placed over open side, where substrate is located inside holder for graphene film synthesis.

BOI A A, LI X, BOL A A