国家/地区 德国（5）
IPC部 B（5）
IPC大类 B01（2） B81（2） C01（2）
G01（2） H04（2）
IPC小类 B81B（2） B81C（2） C01B（2）
H04R（2）
IPC B81B003/00（2） B81B007/02（2） B81C001/00（2）
C01B032/18（2） C01B032/182（2） H04R019/00（2）
H04R031/00（2）
发明人
公开年 2015（3）
申请年 2014（5）
专利权人 INFINEON TEC.（2）

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S

Micro electromechanical system (MEMS) device e.g. MEMS microphone has membrane that is extended over cavity of support and is partially reinforced by graphene.

MASSONER J, MASONE J

Fuel separation device for separating water from a fuel water mixture by filter units, has filter unit performed with a graphene oxide membrane, where the filter units distinguish separation space area by area from water collection chamber.

GERAKIS J

Carbon-type solid acid used in solid acid catalyst, comprises carbonaceous material having sulfonic acid group, and has graphene structure in at least portion and contains boron.

SHIOYAMA H, SAKURAI H, XU Q, KIUCHI M, KIMURA Y, MU C

MEMS acoustic transducer, has dielectric spacer arranged on back plate unit between adjacent conductive perforated back plate portions, and graphene membranes supported by dielectric spacer and extended over perforated back plate portions.

DEHE A, RUHL G, DEU A, RUHR G