国家/地区 韩国（3） 美国（2） 世界知识产权组织（2）
IPC部 C（4）
IPC大类 C23（4） C01（2） H01（2）
IPC小类 C23C（4） C01B（2） H01L（2）
IPC C23C016/44（4）
发明人 JEON S（2） LEE J（2） OH S（2）
公开年 2012（2） 2014（2）
申请年 2012（2）  2013（2） 
专利权人 KOREA ADVANCED INST SCI TECHNOLOGY（4）

Chemical vapor deposition (CVD) auxiliary device for use in production of high quality and large sized graphene, has metallic foil that is deposited on substrate placed above sealing element provided between cover plates.

AHN C W, KANG I S, SHIN Y H, YOO K

Graphene layer formation method involves subjecting board comprising of stack of layers to high pressure annealing in vacuum atmosphere or inert gas atmosphere.

CHO B J, MUN J H

Manufacture of graphene used for e.g. touch screen, involves forming transition metal catalyst layer on substrate, supplying carbon source vapor to chamber and segregating graphene from carbon component in catalyst-layer surface.

JEON S, LEE J, OH S

Manufacture of graphene for e.g. touch screen, involves loading substrate having catalyst layer into chamber, evaporating, supplying carbon source gas, heating in primary portion of catalyst layer, dissolving carbon component, and cooling.

JEON S, LEE J, OH S, RAN O S, SEOP L J, U JEON S, JIN S L, SE R O, SEOK W J