国家/地区 日本（3）
IPC部 B（3）
IPC大类 B01（3）
IPC小类 B01J（3）
IPC B01J037/02（3）
发明人
公开年
申请年
专利权人

Loaded body for fuel cell, has sputtering source, pulse power supply, inert gas supply unit and nanocluster growth cell, where when nanoclusters are produced in vapor phase using nanocluster generating device, and nanoclusters are supported on carrier, each carriers loaded with nanoclusters.

NAKAJIMA A, TSUNOYAMA H, UNO M, GUNJI H, ANDO T, TSUKAMOTO K, TONA M, HIRATA N

Pre-processing method of catalyst metal layer during formation of graphene, involves activating catalyst metal layer by applying plasma of process gas containing reducible gas and nitrogen-containing gas to catalyst metal layer.

MATSUMOTO TAKASHI, MATSUMOTO T

Fabricating graphene to fabricate FET, comprises forming alloy catalyst layer on substrate using sputtering method and/or evaporation method, and forming graphene layer on alloy catalyst layer by supplying hydrocarbon gas onto substrate.

WOO Y, SEO D, SEO S, CHUNG H, KANG S, HEO J, SEO S A, CHUNG H J, KANG S R, HEO J S, WOO Y S, JUNG H J, HUH J S, YEO R, XU D, HUH J, JUNG H