国家/地区 中国（3） 美国（3） 日本（2） 韩国（2）
IPC部 B（4）
IPC大类 B01（4）
IPC小类 B01J（4）
IPC C23C014/02（4）
发明人
公开年 2022（2）
申请年
专利权人

Preparing metal nanoparticle comprises placing boron powder and metal in cleaned crucible, degassing, annealing single crystal metal sheet substrate, growing single layer of boron on substrate and depositing metal on boron-coated substrate by vacuum heating and forming metal dispersion.

DAI D, MA Z, ZHAO X, WANG H

Preparing magnetron graphene-based micro-nano motor comprises mixing ferric chloride crystal powder with deionizgraphene-baseded water, immersing in ferric chloride solution, attaching carbon-based microspheres, and pumping out gas in vacuum cavity and continuously introducing oxygen.

CHEN X, HOU M, YAN L, XIE B, GUO Y, CHEN Y

Production of graphene used as wiring material, involves supplying carbon-containing gas and metal catalyst into chamber and reactivating catalyst by supplying process gas and carbon-containing gas to regrow graphene on catalyst surface.

IFUKU R, MATSUMOTO T

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A