国家/地区 韩国（3）
IPC部 B（3）
IPC大类 B32（3） C01（3）
IPC小类 B32B（3）
IPC B32B038/18（3）
发明人 YI S（3）
公开年 2022（3）
申请年 2021（3） 
专利权人 ALPHA GRAPHE.（3）

System for transferring graphene to transfer substrate e.g. wafer in vacuum equipment, has substrate loading unit that is provided with transfer substrate onto which graphene is transferred and jig that is seated by inserting transfer substrate into seating groove.

YI S

Device e.g. in graphene transfer method comprises support part disposed under graphene transfer unit, moves graphene transfer unit in upper or lower direction, and substrate loading part transferred in chamber body, disposed on support part.

YI S

System e.g. in graphene transfer method comprises e.g. graphene conveying unit having carrier substrate adhered with graphene and heat treatment module disposed under jig with transfer substrate inserted into seating groove to be seated.

YI S, LEE S K