国家/地区 台湾（3）
IPC部 C（3）
IPC大类 C23（3）
IPC小类 C23C（3） C01B（2） H01L（2）
IPC C23C014/02（3）
发明人
公开年 2021（2）
申请年
专利权人

Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.

BURGGRAF J, JUERGEN B

Electro-optic device e.g. phase shifter, has crystalline magnesium oxide seed layer located directly on amorphous insulating cladding layer, and crystalline electro optic layer directly located on crystalline MgO seed layer.

THOMPSON M, WONGPIYA R, CHANG C

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A