国家/地区 美国（4） 中国（2） 台湾（2）
IPC部 C（4）
IPC大类 C23（4）
IPC小类 C23C（4） H01L（3） G03F（2）
IPC C23C016/26（4）
发明人 CHEN C（4）
公开年 2018（2）
申请年 2016（4）
专利权人 TAIWAN SEMIC.（2）

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Graphene pellicle method for extreme ultraviolet lithography, involves attaching carrier to graphene layer, removing substrate from first assembly, and removing first material layer from first assembly.

TU C, CHEN C

Interconnecting carbon nanotube device of graphene/metal composite electrode involves preparing carbon nanotube device, annealing at high temperature, and decomposing carbon source gas molecules into carbon atoms or dissolving in electrode.

CHEN C, GAO J, WANG Y, ZHOU W, ZHU Y

Composite electrode material for lithium-based battery comprises core made from graphite, tin, antimony, silicon, and/or germanium, and graphene nano-wall layer which is grown from the core and covers the core.

TZENG Y, CHEN C, TZENG Y H